Resolution Enhancement Techniques in Optical Lithography PDF
By:Alfred Kwok-Kit Wong
Published on 2001 by SPIE Press
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers.
This Book was ranked at 36 by Google Books for keyword Resolution.
Book ID of Resolution Enhancement Techniques in Optical Lithography's Books is gpuaXbzEBqEC, Book which was written byAlfred Kwok-Kit Wonghave ETAG "GkYYoLzuwcA"
Book which was published by SPIE Press since 2001 have ISBNs, ISBN 13 Code is 9780819439956 and ISBN 10 Code is 0819439959
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Book which have "214 Pages" is Printed at BOOK under CategoryScience
Book was written in en
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